- Patent Title: Method for producing semiconductor device and semiconductor device
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Application No.: US15228049Application Date: 2016-08-04
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Publication No.: US09780215B2Publication Date: 2017-10-03
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/02 ; H01L21/306 ; H01L29/40 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/06

Abstract:
A method for producing a semiconductor device includes a first step of forming a fin-shaped semiconductor layer on a semiconductor substrate and forming a first insulating film; a second step of forming a pillar-shaped semiconductor layer and a first dummy gate; a third step of forming a second dummy gate; a fourth step of forming a fifth insulating film and a sixth insulating film; a fifth step of depositing a first interlayer insulating film, removing the second dummy gate and the first dummy gate, forming a gate insulating film, depositing metal, and performing etch back to form a gate electrode and a gate line; a seventh step of forming a seventh insulating film; and an eighth step of forming insulating film sidewalls, forming a first epitaxially grown layer on the fin-shaped semiconductor layer, and forming a second epitaxially grown layer on the pillar-shaped semiconductor layer.
Public/Granted literature
- US20160343847A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2016-11-24
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