Invention Grant
- Patent Title: High performance GeSi avalanche photodiode operating beyond Ge bandgap limits
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Application No.: US14304702Application Date: 2014-06-13
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Publication No.: US09780248B2Publication Date: 2017-10-03
- Inventor: Mengyuan Huang , Pengfei Cai , Dong Pan , Liangbo Wang , Su Li , Tuo Shi , Tzung I Su , Wang Chen , Ching-yin Hong
- Applicant: Mengyuan Huang , Pengfei Cai , Dong Pan , Liangbo Wang , Su Li , Tuo Shi , Tzung I Su , Wang Chen , Ching-yin Hong
- Applicant Address: US MA Woburn
- Assignee: SIFOTONICS TECHNOLOGIES CO., LTD.
- Current Assignee: SIFOTONICS TECHNOLOGIES CO., LTD.
- Current Assignee Address: US MA Woburn
- Agency: Han IP Corporation
- Agent Andy M. Han
- Main IPC: H01L31/107
- IPC: H01L31/107

Abstract:
Avalanche photodiodes (APDs) having at least one top stressor layer disposed on a germanium (Ge) absorption layer are described herein. The top stressor layer can increase the tensile strain of the Ge absorption layer, thus extending the absorption of APDs to longer wavelengths beyond 1550 nm. In one embodiment, the top stressor layer has a four-layer structure, including an amorphous silicon (Si) layer disposed on the Ge absorption layer; a first silicon dioxide (SiO2) layer disposed on the amorphous Si layer, a silicon nitride (SiN) layer disposed on the first SiO2 layer, and a second SiO2 layer disposed on the SiN layer. The Ge absorption layer can be further doped by p-type dopants. The doping concentration of p-type dopants is controlled such that a graded doping profile is formed within the Ge absorption layer to decrease the dark currents in APDs.
Public/Granted literature
- US20140291682A1 High Performance GeSi Avalanche Photodiode Operating Beyond Ge Bandgap Limits Public/Granted day:2014-10-02
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