Invention Grant
- Patent Title: Apparatus and method for deterministic control of surface figure during full aperture pad polishing
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Application No.: US14055780Application Date: 2013-10-16
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Publication No.: US09782871B2Publication Date: 2017-10-10
- Inventor: Tayyab Ishaq Suratwala , Michael Douglas Feit , William Augustus Steele
- Applicant: LAWRENCE LIVERMORE NATIONAL SECURITY, LLC.
- Applicant Address: US CA Livermore
- Assignee: Lawrence Livermore National Security, LLC
- Current Assignee: Lawrence Livermore National Security, LLC
- Current Assignee Address: US CA Livermore
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: B24B37/04
- IPC: B24B37/04 ; B24B37/10 ; B24B37/32 ; B24B53/12 ; B24B13/00 ; B24B53/017

Abstract:
A polishing system configured to polish a lap includes a lap configured to contact a workpiece for polishing the workpiece; and a septum configured to contact the lap. The septum has an aperture formed therein. The radius of the aperture and radius the workpiece are substantially the same. The aperture and the workpiece have centers disposed at substantially the same radial distance from a center of the lap. The aperture is disposed along a first radial direction from the center of the lap, and the workpiece is disposed along a second radial direction from the center of the lap. The first and second radial directions may be opposite directions.
Public/Granted literature
- US20170190016A9 APPARATUS AND METHOD FOR DETERMINISTIC CONTROL OF SURFACE FIGURE DURING FULL APERTURE PAD POLISHING Public/Granted day:2017-07-06
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