Invention Grant
- Patent Title: Method for producing a component
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Application No.: US15121638Application Date: 2015-02-11
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Publication No.: US09783410B2Publication Date: 2017-10-10
- Inventor: Wolfram Geiger , Uwe Breng , Martin Hafen , Guenter Spahlinger
- Applicant: NORTHROP GRUMMAN LITEF GMBH
- Applicant Address: DE
- Assignee: NORTHROP GRUMMAN LITEF GMBH
- Current Assignee: NORTHROP GRUMMAN LITEF GMBH
- Current Assignee Address: DE
- Agency: Tarolli, Sundheim, Covell & Tumino LLP
- Priority: DE102014002824 20140225
- International Application: PCT/EP2015/000305 WO 20150211
- International Announcement: WO2015/128064 WO 20150903
- Main IPC: B81B3/00
- IPC: B81B3/00 ; H01L21/00 ; B81C1/00

Abstract:
In a method for producing a component, a first layer composite is first produced, comprising a structured layer and a trench filled with an insulating material. The structured layer is electrically conductive at least in a first region. The trench filled with an insulating material extends outwards from a first surface of the structured layer and is arranged in the first region of the structured layer. The first surface of the structured layer faces a first surface of the first layer composite. The method additionally has the step of producing a second layer composite, which has a first depression in a first surface of the second layer composite, and the step of connecting the first layer composite to the second layer composite. The first surface of the first layer composite adjoins the first surface of the second layer composite at least in some regions, said filled trench being arranged within the lateral position of the first depression. After the first layer composite has been connected to the second layer composite, the thickness of the first layer composite from a second surface of the first layer composite to the depth of the filled trench is reduced. The second surface of the first layer composite lies opposite the first surface of the first layer composite. The method further has the step of producing an active structure in the structured layer, said active structure comprising two second regions which are arranged in the first region of the structured layer and which are mechanically connected to each other in a rigid manner but are electrically insulated from each other by means of the filled trench.
Public/Granted literature
- US20160368761A1 METHOD FOR PRODUCING A COMPONENT Public/Granted day:2016-12-22
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