Invention Grant
- Patent Title: Vacuum processing system, vacuum processing device, lubricating agent supply device, and lubricating agent supplying method
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Application No.: US14607661Application Date: 2015-01-28
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Publication No.: US09784317B2Publication Date: 2017-10-10
- Inventor: Masatoshi Onoda
- Applicant: NISSIN ION EQUIPMENT CO., LTD
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee: NISSIN ION EQUIPMENT CO., LTD.
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: JP2014-092478 20140428
- Main IPC: F16C33/66
- IPC: F16C33/66 ; F16N21/00 ; F16C29/00 ; F16N29/02 ; F16N35/00 ; F16N7/38 ; F16N9/00 ; F16C29/06

Abstract:
A transport system is a vacuum processing system that includes a transport device that is provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the transport device and provided in the ambient atmosphere. The transport device has a lubricating agent flow channel that is a channel for grease injected to a site subject to lubrication. The lubricating agent supply device has a grease server that stores a lubricating agent in the ambient atmosphere, a lubricating agent supply pipe which is a channel that guides the grease stored in the grease server to the lubricating agent flow channel and that connects the grease server and the lubricating agent flow channel, and an exhaust pump that exhausts the inside of the lubricating agent supply pipe.
Public/Granted literature
Information query