Invention Grant
- Patent Title: Bolometric detector with MIM structures of different dimensions
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Application No.: US14865564Application Date: 2015-09-25
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Publication No.: US09784623B2Publication Date: 2017-10-10
- Inventor: Ujwol Palanchoke , Salim Boutami , Stephane Pocas , Wilfried Rabaud
- Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1459157 20140926
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J5/22 ; G01J5/08

Abstract:
A bolometric detector of LWIR wavelengths, including: a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectric element positioned between the lower and upper metal elements; a thermometric element comprising at least one thermometric material; wherein: the membrane includes the upper metal element, the thermometric material and one portion of the dielectric element of each MIM structure, the upper metal elements of at least two MIM structure have different dimensions relatively to each other in the main plane of the membrane, and the dielectric element of each of the MIM structures includes at least one of the following materials having vibrational modes in the LWIR range: Al2O3, AlN, TiO2.
Public/Granted literature
- US20160091371A1 BOLOMETRIC DETECTOR WITH MIM STRUCTURES OF DIFFERENT DIMENSIONS Public/Granted day:2016-03-31
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