- Patent Title: Lens array, wavefront sensor, wavefront measurement apparatus, shape measurement apparatus, aberration measurement apparatus, manufacturing method of optical element, and manufacturing method of optical device
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Application No.: US15242068Application Date: 2016-08-19
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Publication No.: US09784641B2Publication Date: 2017-10-10
- Inventor: Atsushi Maeda
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc., IP Division
- Priority: JP2015-166393 20150826
- Main IPC: G01B9/00
- IPC: G01B9/00 ; G01M11/02 ; G02B3/00 ; G02B5/20 ; H04N5/225
Abstract:
A lens array includes a plurality of lenses that collect divided test light and form spots. Each lens includes a lens member, and a light shielding mask provided concentric to the lens member along a perimeter edge thereof, the light shielding mask shielding a part of the light and transmitting a part of the light. The light shielding mask is formed to satisfy a predetermined mathematical condition of light transmission.
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