A measuring electrode for chemical liquid in semiconductor process that measures a chemical liquid used for a semiconductor process comprises a first body having a first internal liquid chamber into which a first internal liquid is filled, and a flow tube for a part or all of which a responsive glass is used and that forms a flow channel where a chemical liquid as being a measuring object flows, wherein the flow tube is so arranged to penetrate the first body and the responsive glass makes contact with the first internal liquid in the first internal liquid chamber.