Invention Grant
- Patent Title: Split-ring resonator plasma source
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Application No.: US14896363Application Date: 2014-06-05
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Publication No.: US09784712B2Publication Date: 2017-10-10
- Inventor: Anders Persson , Greger Thornell , Martin Berglund
- Applicant: Anders Persson , Greger Thornell , Martin Berglund
- Agency: The Marbury Law Group PLLC
- International Application: PCT/IB2014/003264 WO 20140605
- International Announcement: WO2015/114402 WO 20150806
- Main IPC: G01R27/04
- IPC: G01R27/04 ; G01R27/32 ; G01N27/62 ; H05H1/24 ; G01N27/02 ; H01J37/32 ; H05H1/46 ; H05H1/48

Abstract:
A miniaturized plasma source includes a stripline split-ring resonator. The split-ring resonator is sandwiched between two dielectric substrates and two metal ground planes. In order to make the plasma accessible from the outside of the ground planes, a hole is made through the gap between the ends of the split ring. The two ground planes act as an electromagnetic shield, protecting the split-ring resonator from electromagnetic interference due to changes in the electric or dielectric environment surrounding it. The miniaturized plasma source is particularly useful in optogalvanic spectroscopy applications.
Public/Granted literature
- US20160123927A1 Split-Ring Resonator Plasma Source Public/Granted day:2016-05-05
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