Invention Grant
- Patent Title: Liquid processing method, memory medium and liquid processing apparatus
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Application No.: US14870609Application Date: 2015-09-30
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Publication No.: US09786488B2Publication Date: 2017-10-10
- Inventor: Akiko Kai , Takafumi Niwa , Shogo Takahashi , Hiroshi Nishihata , Yuichi Terashita , Teruhiko Kodama
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-ku
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-203176 20141001
- Main IPC: B08B3/00
- IPC: B08B3/00 ; H01L21/02 ; H01L21/033 ; H01L21/311 ; H01L21/67 ; H01L21/687

Abstract:
A liquid processing method for liquid-processing a substrate includes setting a substrate on a substrate holding device which rotates the substrate such that the substrate is held in horizontal position, supplying processing liquid to center portion of the substrate such that the center portion positioned center side with respect to peripheral portion of the substrate is liquid-processed, positioning a discharge port of a processing liquid nozzle toward downstream side in rotation direction such that the liquid is discharged to the peripheral portion obliquely to surface of the substrate and along tangential direction of the substrate while the substrate is rotated, and discharging gas from a gas nozzle perpendicularly to the surface of the substrate toward position that is adjacent to liquid landing position of the liquid on the surface of the substrate and is on the center side of the substrate, while the liquid is discharged to the peripheral portion.
Public/Granted literature
- US20160096203A1 LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPARATUS Public/Granted day:2016-04-07
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