- Patent Title: Polycrystalline semiconductor layer and fabricating method thereof
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Application No.: US15038350Application Date: 2015-12-28
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Publication No.: US09786500B2Publication Date: 2017-10-10
- Inventor: Wenqing Xu , Hongwei Tian , Chunping Long
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Chaoyang District, Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Chaoyang District, Beijing
- Agency: Intellectual valley law, P.C.
- Priority: CN201510250931 20150515
- International Application: PCT/CN2015/099239 WO 20151228
- International Announcement: WO2016/184114 WO 20161124
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/66 ; H01L29/786 ; H01L27/12 ; C30B1/02 ; C30B28/02 ; C30B29/06

Abstract:
The present application discloses a method of fabricating a polycrystalline semiconductor layer, comprising forming a heat storage layer; forming a buffer layer on the heat storage layer; forming a first amorphous semiconductor layer on a side of the buffer layer distal to the heat storage layer; and crystallizing the first amorphous semiconductor layer to form a first polycrystalline semiconductor layer.
Public/Granted literature
- US20170103890A1 POLYCRYSTALLINE SEMICONDUCTOR LAYER AND FABRICATING METHOD THEREOF Public/Granted day:2017-04-13
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