Invention Grant
- Patent Title: Gas purge unit, load port apparatus, and installation stand for purging container
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Application No.: US14554851Application Date: 2014-11-26
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Publication No.: US09786531B2Publication Date: 2017-10-10
- Inventor: Mutsuo Sasaki , Jun Emoto , Hiroshi Igarashi
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Arent Fox LLP
- Priority: JP2014-162601 20140808
- Main IPC: B08B5/02
- IPC: B08B5/02 ; H01L21/673 ; B08B9/00 ; H01L21/677

Abstract:
A gas purge unit includes an intake nozzle 28, a pivotable body 31, and an O-ring 35. The intake nozzle 28 has a nozzle opening 26 flowing out a cleaning gas. The pivotable body 31 is arranged in a ring shape to surround a cylindrical projection 28b of the nozzle 28, and is provided with a contact part 34 formed on a tip portion of the pivotable body 31 to be able to detachably contact with the intake port 5. The ring-shaped O-ring 35 is held to be compressively elastically deformable along a longitudinal direction of the cylindrical projection 28b between a rear end of the pivotable body 31 and a base portion 28a of the nozzle 28.
Public/Granted literature
- US20160038982A1 GAS PURGE UNIT, LOAD PORT APPARATUS, AND INSTALLATION STAND FOR PURGING CONTAINER Public/Granted day:2016-02-11
Information query
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