Invention Grant
- Patent Title: Reticle rack system
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Application No.: US15355289Application Date: 2016-11-18
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Publication No.: US09786536B2Publication Date: 2017-10-10
- Inventor: Sean Kudel , Andy Escandon , Spencer Read , Gilbert Hernandez , Ryan Irish , Joanne Valestin
- Applicant: Microchip Technology Incorporated
- Applicant Address: US AZ Chandler
- Assignee: MICROCHIP TECHNOLOGY INCORPORATED
- Current Assignee: MICROCHIP TECHNOLOGY INCORPORATED
- Current Assignee Address: US AZ Chandler
- Agency: Slayden Grubert Beard PLLC
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G1/10 ; A47B47/00 ; A47B49/00 ; A47B81/00

Abstract:
The present disclosure relates to semiconductor manufacturing, in particular to reticle rack systems. The teachings of the present disclosure may be embodied in a reticle rack unit including a frame with four uprights and multiple crossbars and four turnstiles. The frame may have a longest dimension defining a front side and a back side. The four turnstiles may be mounted to the frame to pivot around a respective rotational axis parallel to the four uprights. Each turnstile may define a plurality of reticle nests sized to hold reticles.
Public/Granted literature
- US20170158429A1 Reticle Rack System Public/Granted day:2017-06-08
Information query
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