Invention Grant
- Patent Title: Attachment member and attachment device using the same
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Application No.: US14655318Application Date: 2013-12-13
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Publication No.: US09786538B2Publication Date: 2017-10-10
- Inventor: Hiroyasu Momikura
- Applicant: KYOCERA Corporation
- Applicant Address: JP Kyoto
- Assignee: KYOCERA Corporation
- Current Assignee: KYOCERA Corporation
- Current Assignee Address: JP Kyoto
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Priority: JP2012-281259 20121225
- International Application: PCT/JP2013/083171 WO 20131213
- International Announcement: WO2014/103714 WO 20140703
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/687 ; C23C14/04

Abstract:
An attachment member (1) according to an embodiment of the present invention includes: a base (4) composed of a ceramic sintered body, which has an annular part (6) corresponding to a shape of an object (2), a bottom surface (7) located inside the annular part (6), and a plurality of column shaped protruding parts (8) protruding from the bottom surface (7), and is provided with an attachment surface (3) supporting and attaching the object (2) inside the annular part (6) by a plurality of the protruding parts (8); and a film (5) that covers at least a part of the bottom surface (7), exposes top surfaces (11) of the protruding parts (8), and has higher hydrophilicity than the base (4). Accordingly, it is possible to provide the attachment member (1) that is excellent in attachment force for the object (2), and suppresses contamination of the object (2).
Public/Granted literature
- US20150357220A1 ATTACHMENT MEMBER AND ATTACHMENT DEVICE USING THE SAME Public/Granted day:2015-12-10
Information query
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