Invention Grant
- Patent Title: Low resistance metal contacts to interconnects
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Application No.: US14749811Application Date: 2015-06-25
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Publication No.: US09786550B2Publication Date: 2017-10-10
- Inventor: Stephen M. Gates , Gregory M. Fritz , Eric A. Joseph , Terry A. Spooner
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L23/528

Abstract:
A semiconductor device and a method of fabricating a contact to interface with an interconnect in a semiconductor device are described. The device includes a dielectric layer formed on a semiconductor layer, and a contact fabricated in a via formed within the dielectric layer. An interconnect formed above the contact interfaces with an exposed surface of the contact opposite a surface closest to the semiconductor layer. The contact includes a contact material in a first portion of the contact and an interface metal in a second portion of the contact.
Public/Granted literature
- US20160379869A1 LOW RESISTANCE METAL CONTACTS TO INTERCONNECTS Public/Granted day:2016-12-29
Information query
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