Invention Grant
- Patent Title: Semiconductor device having wires
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Application No.: US15098351Application Date: 2016-04-14
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Publication No.: US09786601B2Publication Date: 2017-10-10
- Inventor: Yuichi Nakao , Satoshi Kageyama , Masaru Naitou
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Rabin & Berdo, P.C.
- Priority: JP2006-302982 20061108; JP2006-306998 20061113
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40 ; H01L23/528 ; B23D51/12 ; H01L21/768 ; H01L23/00 ; H01L23/522 ; H01L23/532

Abstract:
A semiconductor device includes a semiconductor substrate, a first insulating layer laminated on the semiconductor substrate, a first metal wiring pattern embedded in a wire-forming region of the first insulating layer, a second insulating layer laminated on the first insulating layer, a second metal wiring pattern embedded in a wire-forming region of the second insulating layer and first dummy metal patterns embedded each in a wire-opposed region opposing to the wire-forming region of the second insulating layer and in a non-wire-opposed region opposing to a non-wire-forming region other than the wire-forming region of the second insulating layer, the wire-opposed region and the non-wire-opposed region each in a non-wire-forming region other than the wire-forming region of the first insulating layer.
Public/Granted literature
- US20160225711A1 SEMICONDUCTOR DEVICE Public/Granted day:2016-08-04
Information query
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