Invention Grant
- Patent Title: Semiconductor apparatus, method for manufacturing the same, electronic device, and moving body
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Application No.: US15231469Application Date: 2016-08-08
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Publication No.: US09786616B2Publication Date: 2017-10-10
- Inventor: Kazunobu Kuwazawa , Hiroaki Nitta , Takehiro Endo , Mitsuo Sekisawa
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-163100 20150820
- Main IPC: H01L23/488
- IPC: H01L23/488 ; H01L23/00

Abstract:
A semiconductor apparatus includes elements formed on a substrate, a first insulation layer, a first pad and a second pad arranged on the first insulation layer and located above the elements, and a second insulation layer that is arranged on the side surfaces and upper surfaces of the first pad and the second pad. The second insulation layer includes openings at upper surfaces of the first pad and the second pad. The thickness of the first pad and the second pad is 2 μm or more, the thickness of the second insulation layer is less than or equal to ⅖ of the thickness of the first pad and the second pad, and the distance between the first pad and the second pad is greater than or equal to four times the thickness of the first pad and the second pad.
Public/Granted literature
- US20170053880A1 SEMICONDUCTOR APPARATUS, METHOD FOR MANUFACTURING THE SAME, ELECTRONIC DEVICE, AND MOVING BODY Public/Granted day:2017-02-23
Information query
IPC分类: