Invention Grant
- Patent Title: Fabrication method of a stack of electronic devices
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Application No.: US15388617Application Date: 2016-12-22
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Publication No.: US09786658B2Publication Date: 2017-10-10
- Inventor: Benoit Mathieu , Claire Fenouillet-Beranger
- Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oliff PLC.
- Priority: FR1563133 20151222
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/324 ; H01L27/06 ; H01L21/265 ; H01L23/00

Abstract:
This method comprises the following steps: a) providing a first structure successively comprising a first substrate, a first electronic device, and a first dielectric layer; a second structure successively comprising a second substrate, an active layer, a second dielectric layer, and a polycrystalline semiconductor layer, the active layer being designed to form a second electronic device; b) bombarding the polycrystalline semiconductor layer by a beam of species configured to form an amorphous part and to preserve a superficial polycrystalline part; c) bonding the first and second structures; d) removing the second substrate of the second structure; e) introducing dopants into the amorphous part, through the exposed active layer; f) thermally activating the dopants by recrystallization of the amorphous part.
Public/Granted literature
- US20170179114A1 FABRICATION METHOD OF A STACK OF ELECTRONIC DEVICES Public/Granted day:2017-06-22
Information query
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