Invention Grant
- Patent Title: Niobium-containing film forming compositions and vapor deposition of niobium-containing films
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Application No.: US15130529Application Date: 2016-04-15
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Publication No.: US09786671B2Publication Date: 2017-10-10
- Inventor: Clément Lansalot-Matras , Wontae Noh
- Applicant: L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Applicant Address: FR Paris
- Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee: L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
- Current Assignee Address: FR Paris
- Agent Patricia E. McQueeney
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/285 ; H01L49/02 ; C07F9/00 ; C23C16/455
Abstract:
Niobium-containing film forming compositions are disclosed, along with methods of synthesizing the same, and methods of forming Niobium-containing films on one or more substrates via vapor deposition processes using the Niobium-containing film forming compositions.
Public/Granted literature
- US20160307902A1 NIOBIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION OF NIOBIUM-CONTAINING FILMS Public/Granted day:2016-10-20
Information query
IPC分类:
