Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and method of manufacturing the same
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Application No.: US14798891Application Date: 2015-07-14
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Publication No.: US09786678B2Publication Date: 2017-10-10
- Inventor: Katsuyuki Sekine , Masaaki Higuchi , Masao Shingu , Hirokazu Ishigaki , Naoki Yasuda
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/51 ; H01L21/02 ; H01L27/1157 ; H01L27/11575

Abstract:
According to an embodiment, a nonvolatile semiconductor memory device comprises a plurality of conductive layers stacked in a first direction via an inter-layer insulating layer. In addition, the nonvolatile semiconductor memory device comprises: a semiconductor layer having the first direction as a longer direction; a tunnel insulating layer contacting a side surface of the semiconductor layer; a charge accumulation layer contacting a side surface of the tunnel insulating layer; and a block insulating layer contacting a portion facing the conductive layer, of a side surface of the charge accumulation layer. Moreover, the portion facing the conductive layer, of the charge accumulation layer is thinner compared to a portion facing the inter-layer insulating layer, of the charge accumulation layer.
Public/Granted literature
- US20160079269A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-03-17
Information query
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