Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and method of manufacturing the same
-
Application No.: US15271407Application Date: 2016-09-21
-
Publication No.: US09786683B1Publication Date: 2017-10-10
- Inventor: Kiwamu Sakuma , Keiji Ikeda , Masumi Saitoh
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-054724 20160318
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L23/522 ; H01L23/528 ; H01L29/78 ; H01L29/24 ; H01L27/11582 ; H01L27/11568 ; H01L27/11573 ; H01L29/423 ; H01L29/08 ; H01L21/28

Abstract:
This nonvolatile semiconductor memory device includes: a memory cell array including a memory cell; a wiring part connecting the memory cell array to an external circuit; and a transistor that connects the wiring part and the external circuit, the transistor including: a first insulating layer including a first region, a second region, and a third region, the second and third regions being disposed on both sides of the first region, and a height of an upper surface of the first region being lower than those of the second region and the third region; a semiconductor layer disposed along upper surfaces of the first region, the second region, and the third region; and a gate electrode layer disposed via the semiconductor layer and a gate insulating film, on an upper part of the second region.
Public/Granted literature
- US20170271364A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-09-21
Information query
IPC分类: