- Patent Title: Vertical field effect transistor and method of fabricating the same
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Application No.: US15271660Application Date: 2016-09-21
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Publication No.: US09786784B1Publication Date: 2017-10-10
- Inventor: Hyun Seung Song , Soo Yeon Jeong , Hyung Suk Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L29/417 ; H01L21/306 ; H01L29/66

Abstract:
A vertical fin field effect transistor (V-FinFET) is provided as follows. A T-shaped fin structure extend vertically from an upper surface of a substrate. The T-shaped fin structure includes a lower part and an upper part. The lower part is in contact with the upper surface of the substrate. The upper part of the T-shaped fin structure is vertically stacked on the lower part of the T-shaped fin structure. A gate insulating layer surrounds the lower part. A work-function-control pattern surrounds the lower part. The gate insulating layer is interposed between the work-function-control pattern and the lower part of the T-shaped fin structure. A gate electrode is disposed on a sidewall of the work-function-control pattern.
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