Vertical-transport FinFET device with variable Fin pitch
Abstract:
A semiconductor device includes a plurality of vertical-transport fin field effect transistors that are arranged at a locally-variable fin pitch. Within a first region of the device, a first plurality of fins are arranged at a first pitch (d1), and within a second region of the device, a second plurality of fins are arranged as a second pitch (d2) less than the first pitch. The second plurality of fins share merged source, drain and gate regions, while the source, drain and gate regions for the first plurality of fins are unmerged.
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