Invention Grant
- Patent Title: Vertical cavity surface emitting laser array and method for manufacturing vertical cavity surface emitting laser array
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Application No.: US15209973Application Date: 2016-07-14
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Publication No.: US09787062B2Publication Date: 2017-10-10
- Inventor: Takashi Kondo , Akemi Murakami , Naoki Jogan , Junichiro Hayakawa , Jun Sakurai
- Applicant: FUJI XEROX CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: FUJI XEROX CO., LTD.
- Current Assignee: FUJI XEROX CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2015-173992 20150903
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/42 ; H01S5/042 ; H01S5/022 ; H01S5/183 ; H01S5/343

Abstract:
A vertical cavity surface emitting laser array includes a contact layer formed on a substrate; mesa structures formed on the contact layer, each mesa structure including a first semiconductor multilayer reflector of a first conductivity type, an active region on the first semiconductor multilayer reflector, and a second semiconductor multilayer reflector of a second conductivity type on the active region; a first metal layer formed on the contact layer around the mesa structures, a portion of the first metal layer serving as an electrode pad of the first conductivity type; an insulating film formed on the first metal layer; and a second metal layer formed on the insulating film, a portion of the second metal layer serving as an electrode pad of the second conductivity type. The mesa structures are electrically connected in parallel.
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