Invention Grant
- Patent Title: Resonator element, resonator, resonator device, oscillator, electronic apparatus, and moving object
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Application No.: US15070505Application Date: 2016-03-15
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Publication No.: US09787281B2Publication Date: 2017-10-10
- Inventor: Junji Kobayashi , Jun Nishide
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-053854 20150317
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H03H9/17 ; H03H9/19 ; H03B5/36 ; H03H9/02 ; H03H9/05 ; H03H9/08 ; H03H9/10 ; H03H9/13

Abstract:
A resonator element includes a substrate having a first region performing thickness shear vibration, a second region located in a periphery of the first region and having a smaller thickness than the first region, a fixed end, and a free end opposite to the fixed end in the first region in a plan view. Excitation electrodes are disposed on a front and a rear of the first region and have regions overlapping each other in the plan view. A center of the first region and a center of the regions overlapping each other are located between a center of the substrate and the free end in the plan view. When Cs is a distance between the center of the regions overlapping each other and the center of the substrate in the plan view, a relation of 105 μm
Public/Granted literature
- US20160277004A1 RESONATOR ELEMENT, RESONATOR, RESONATOR DEVICE, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2016-09-22
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