Invention Grant
- Patent Title: Micromechanical sensor device
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Application No.: US14536091Application Date: 2014-11-07
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Publication No.: US09790084B2Publication Date: 2017-10-17
- Inventor: Arnd Kaelberer , Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013222733 20131108
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01C19/00 ; B81B7/00 ; G01P15/08 ; B81C1/00

Abstract:
A micromechanical sensor device includes an evaluation circuit formed in a first substrate, and an MEMS structure which is situated in a cavity delimited by a second substrate and a third substrate, the MEMS structure and the second substrate being situated on top of each other, the MEMS structure being functionally connected to the evaluation circuit via a contact area, the contact area between the MEMS structure and the first substrate being situated essentially centrally on the second substrate and essentially centrally on the first substrate and has an essentially punctiform configuration, proceeding radially from the contact area, a clearance being formed between the first substrate and the second substrate.
Public/Granted literature
- US20150128703A1 MICROMECHANICAL SENSOR DEVICE Public/Granted day:2015-05-14
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