Invention Grant
- Patent Title: Detection of environmental conditions in a semiconductor chip
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Application No.: US13729145Application Date: 2012-12-28
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Publication No.: US09793220B2Publication Date: 2017-10-17
- Inventor: Hans-Joachim Barth , Horst Baumeister , Peter Baumgartner , Philipp Riess , Jesenka Veledar Krueger
- Applicant: Hans-Joachim Barth , Horst Baumeister , Peter Baumgartner , Philipp Riess , Jesenka Veledar Krueger
- Applicant Address: DE Neubiberg
- Assignee: INTEL DEUTSCHLAND GMBH
- Current Assignee: INTEL DEUTSCHLAND GMBH
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner mbB
- Main IPC: G01R31/3187
- IPC: G01R31/3187 ; G01R31/26 ; H01L23/544 ; H01L27/04 ; H01L23/00 ; H01L23/64

Abstract:
A capacitive sensor and measurement circuitry is described that may be able to reproducibly measure miniscule capacitances and variations thereof. The capacitance may vary depending upon local environmental conditions such as mechanical stress (e.g., warpage or shear stress), mechanical pressure, temperature, and/or humidity. It may be desirable to provide a capacitor integrated into a semiconductor chip that is sufficiently small and sensitive to accurately measure conditions expected to be experienced by a semiconductor chip.
Public/Granted literature
- US20130240884A1 DETECTION OF ENVIRONMENTAL CONDITIONS IN A SEMICONDUCTOR CHIP Public/Granted day:2013-09-19
Information query
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