Invention Grant
- Patent Title: System and method for multi-location zapping
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Application No.: US15069943Application Date: 2016-03-14
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Publication No.: US09805964B2Publication Date: 2017-10-31
- Inventor: Tuvia Biber , Efim Kerner , Efraim Siman Tov
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee: APPLIED MATERIALS ISRAEL LTD.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/326
- IPC: H01L21/326 ; H01L21/683 ; H01L21/66

Abstract:
A system for zapping a wafer, the system may include a pulse generation unit that is configured to generate (a) first zapping pulses for causing a breakdown in a first location of a backside insulating layer of a wafer, and (b) second zapping pulses for causing a breakdown in a second location of the backside insulating layer of the wafer; a first conductive interface that is configured to convey the first zapping pulses to the first location, while contacting the first location; a second conductive interface that is configured to convey the second zapping pulses to the second location, while contacting the second location; and wherein the first location differs from the second location.
Public/Granted literature
- US20170263485A1 SYSTEM AND METHOD FOR MULTI-LOCATION ZAPPING Public/Granted day:2017-09-14
Information query
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