Invention Grant
- Patent Title: Through-memory-level via structures for a three-dimensional memory device
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Application No.: US15269041Application Date: 2016-09-19
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Publication No.: US09806093B2Publication Date: 2017-10-31
- Inventor: Fumiaki Toyama , Yuki Mizutani , Hiroyuki Ogawa
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L23/528 ; H01L27/11582 ; H01L27/11565 ; H01L27/11573 ; H01L27/11575

Abstract:
A three dimensional NAND memory device includes word line driver devices located on or over a substrate, an alternating stack of word lines and insulating layers located over the word line driver devices, a plurality of memory stack structures extending through the alternating stack, each memory stack structure including a memory film and a vertical semiconductor channel, and through-memory-level via structures which electrically couple the word lines in a first memory block to the word line driver devices. The through-memory-level via structures extend through a through-memory-level via region located between a staircase region of the first memory block and a staircase region of another memory block.
Public/Granted literature
- US20170179152A1 THROUGH-MEMORY-LEVEL VIA STRUCTURES FOR A THREE-DIMENSIONAL MEMORY DEVICE Public/Granted day:2017-06-22
Information query
IPC分类: