Invention Grant
- Patent Title: Laminated body and electronic device
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Application No.: US15343679Application Date: 2016-11-04
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Publication No.: US09806156B2Publication Date: 2017-10-31
- Inventor: Fuminori Mitsuhashi , Takashi Ishizuka , Masaki Ueno , Yoshihiro Tsukuda , Yasunori Tateno , Maki Suemitsu , Hirokazu Fukidome , Hiroyuki Nagasawa
- Applicant: Sumitomo Electric Industries, Ltd. , TOHOKU UNIVERSITY
- Applicant Address: JP Osaka-shi JP Sendai-shi
- Assignee: Sumitomo Electric Industries, Ltd.,Tohoku University
- Current Assignee: Sumitomo Electric Industries, Ltd.,Tohoku University
- Current Assignee Address: JP Osaka-shi JP Sendai-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Kerri M. Patterson
- Priority: JP2015-218773 20151106
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/06 ; H01L29/786 ; H01L21/02 ; H01L21/04 ; H01L29/66

Abstract:
A laminated body includes: a substrate portion composed of silicon carbide; and a graphene film disposed on a first main surface of the substrate portion, the graphene film having an atomic arrangement oriented with respect to an atomic arrangement of the silicon carbide of the substrate portion. A region in which a value of G′/G in Raman spectrometry is not less than 1.2 is not less than 10% in an area ratio in an exposed surface of the graphene film, the exposed surface being a main surface of the graphene film opposite to the substrate portion.
Public/Granted literature
- US20170148880A1 LAYERED BODY AND ELECTRONIC ELEMENT Public/Granted day:2017-05-25
Information query
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