Invention Grant
- Patent Title: Method of producing an optoelectronic semiconductor chip and an optoelectronic semiconductor chip
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Application No.: US15309260Application Date: 2015-05-19
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Publication No.: US09806225B2Publication Date: 2017-10-31
- Inventor: Alexander Pfeuffer
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE
- Agency: DLA Piper LLP (US)
- Priority: DE102014107123 20140520
- International Application: PCT/EP2015/061015 WO 20150519
- International Announcement: WO2015/177164 WO 20151126
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/32 ; H01L33/38 ; H01L33/40 ; H01L31/02 ; H01L31/0224 ; H01L31/0232 ; H01L31/0236 ; H01L31/0304 ; H01L31/18 ; H01L33/22 ; H01L33/46 ; H01L33/62 ; H01S5/02 ; H01S5/028 ; H01S5/227 ; H01S5/32 ; H01S5/323 ; H01L33/44

Abstract:
A method of producing an optoelectronic semiconductor chip includes providing a growth substrate and a semiconductor layer sequence grown on the growth substrate with a main extension plane including a p-conductive layer, an active zone and an n-conductive layer, removing the semiconductor layer sequence in regions to form at least one aperture extending through the p-conductive layer and the active zone into the n-conductive layer of the semiconductor layer sequence, depositing a protective layer on a side of the semiconductor layer sequence facing away from the growth substrate, depositing an aluminum layer containing aluminum across the entire surface on a side of the semiconductor layer sequence facing away from the growth substrate, removing the growth substrate, and forming a mesa by removing the semiconductor layer sequence at the regions of the protective layer, wherein the protective layer is subsequently freely externally accessible at least in places.
Public/Granted literature
- US20170084777A1 METHOD OF PRODUCING AN OPTOELECTRONIC SEMICONDUCTOR CHIP AND AN OPTOELECTRONIC SEMICONDUCTOR CHIP Public/Granted day:2017-03-23
Information query
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