Invention Grant
- Patent Title: System and method for a differential comb drive MEMS
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Application No.: US15443922Application Date: 2017-02-27
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Publication No.: US09809444B2Publication Date: 2017-11-07
- Inventor: Wolfgang Klein
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; B81C1/00 ; H02N2/02 ; H04R19/00

Abstract:
According to an embodiment, a MEMS device includes a deflectable membrane including a first plurality of electrostatic comb fingers, a first anchor structure including a second plurality of electrostatic comb fingers interdigitated with a first subset of the first plurality of electrostatic comb fingers, and a second anchor structure including a third plurality of electrostatic comb fingers interdigitated with a second subset of the first plurality of electrostatic comb fingers. The second plurality of electrostatic comb fingers are offset from the first plurality of electrostatic comb fingers in a first direction and the third plurality of electrostatic comb fingers are offset from the first plurality of electrostatic comb fingers in a second direction, where the first direction is different from the second direction.
Public/Granted literature
- US20170166437A1 System and Method for a Differential Comb Drive MEMS Public/Granted day:2017-06-15
Information query