Invention Grant
- Patent Title: Method for manufacturing silicon single crystal
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Application No.: US15027414Application Date: 2014-10-16
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Publication No.: US09809901B2Publication Date: 2017-11-07
- Inventor: Satoshi Soeta , Shinji Nakano , Kouichi Ikeda
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-242034 20131122
- International Application: PCT/JP2014/005246 WO 20141016
- International Announcement: WO2015/075864 WO 20150528
- Main IPC: C30B15/20
- IPC: C30B15/20 ; C30B15/04 ; C30B29/06 ; C30B30/04 ; C30B15/14

Abstract:
A method for manufacturing a silicon single crystal according to a Czochralski method to manufacture an N-type silicon single crystal, including the steps of: seeding to bring a seed crystal into contact with a silicon melt in a crucible and thereafter, necking to pull the seed crystal to narrow a diameter thereof, wherein a dopant concentration in the silicon melt is predicted by a difference between a temperature at the seeding and a temperature at the necking, and resistivity of the single crystal to be pulled is controlled on the basis of the predicted dopant concentration in the silicon melt. A method for manufacturing a silicon single crystal can efficiently manufacture a silicon single crystal with a desired resistivity.
Public/Granted literature
- US20160237589A1 METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL Public/Granted day:2016-08-18
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