- Patent Title: Damage determination of V-shaped groove guide on roller V-shaped
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Application No.: US14602259Application Date: 2015-01-21
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Publication No.: US09810523B2Publication Date: 2017-11-07
- Inventor: Yu-Hsuan Lin , Chih-Chung Yang , Kuo-Cheng Huang , Tai-Shan Liao
- Applicant: NATIONAL APPLIED RESEARCH LABORATORIES
- Applicant Address: TW Taipei
- Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
- Current Assignee: NATIONAL APPLIED RESEARCH LABORATORIES
- Current Assignee Address: TW Taipei
- Agency: Huntington IP Consulting Co., Ltd.
- Agent Chih Feng Yeh
- Main IPC: G01B11/08
- IPC: G01B11/08 ; G01B11/24

Abstract:
A method for determining if a wire guide roller having a plurality of V-shaped grooves, each having a copper line thereon, arranged column-by-column on a periphery direction thereof is failed after slicing a plurality of wafers is disclosed. Based on the disclosed technical means, the efficacy may be achieved that a damage situation may be automatically examined and notified to maintain a yield in the slicing process in an online high speed environment.
Public/Granted literature
- US20160209202A1 DAMAGE DETERMINATION OF V-SHAPED GROOVE GUIDE ON ROLLER V-SHAPED Public/Granted day:2016-07-21
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