Invention Grant
- Patent Title: Enclosed X-ray imaging system
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Application No.: US14890394Application Date: 2014-05-12
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Publication No.: US09810647B2Publication Date: 2017-11-07
- Inventor: Kazuaki Suzuki , Daniel Hilton
- Applicant: NIKON METROLOGY NV
- Applicant Address: BE Leuven
- Assignee: NIKO METROLOGY NV
- Current Assignee: NIKO METROLOGY NV
- Current Assignee Address: BE Leuven
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C.
- Agent Andrew M. Calderon
- Priority: GB1308597.2 20130513
- International Application: PCT/EP2014/059619 WO 20140512
- International Announcement: WO2014/184127 WO 20141120
- Main IPC: G01N23/04
- IPC: G01N23/04

Abstract:
According to the present disclosure, there is provided an x-ray imaging system, comprising: an x-ray source; an x-ray detector; a sample mount for mounting a sample in a beam path between the x-ray source and the x-ray detector; an enclosure enclosing at least the sample mount in an interior of the enclosure; and a climate control system for regulating the climate inside the enclosure, wherein: the enclosure has an aperture for enabling access to at least the sample mount from outside the enclosure; the enclosure is provided with a door operable between an open position in which the aperture is open and a closed position in which the aperture is closed by the door; and the climate control system is operable to provide a positive pressure differential between the interior of the enclosure and an exterior of the enclosure such that the interior of the enclosure is maintained at a higher pressure than the exterior of the enclosure when the door is open. Such a system is able to better regulate the temperature inside the enclosure even when the door is opened.
Public/Granted literature
- US20160109389A1 ENCLOSED X-RAY IMAGING SYSTEM Public/Granted day:2016-04-21
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