- Patent Title: X-ray fluorescence analyzer and X-ray fluorescence analyzing method
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Application No.: US14948297Application Date: 2015-11-21
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Publication No.: US09810648B2Publication Date: 2017-11-07
- Inventor: Toshiyuki Takahara
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Brinks Gilson & Lione
- Priority: JP2014-238669 20141126
- Main IPC: G01N23/223
- IPC: G01N23/223 ; H01J35/16

Abstract:
An X-ray fluorescence analyzer includes: a sample stage; an X-ray source; a detector; an X stage; a Y stage; a θ stage; and a shielding container, wherein the irradiation position with primary X-rays is set at an offset position from a movement center of the X stage and the Y stage, wherein an irradiation area that is irradiatable with the primary X-rays is set to a selected segmented area from among segmented areas that are defined by segmenting the surface of the sample into four parts with a virtual segment lines in the X direction and the Y direction passing through the movement center, and wherein the θ stage is configured to switch the selected segmented area into any one of the segmented areas by rotating the sample stage by every 90 degrees.
Public/Granted literature
- US20160146745A1 X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYZING METHOD Public/Granted day:2016-05-26
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