Invention Grant
- Patent Title: Opening angle measurement of an oscillating MEMS mirror
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Application No.: US15192718Application Date: 2016-06-24
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Publication No.: US09810902B1Publication Date: 2017-11-07
- Inventor: Offir Duvdevany
- Applicant: STMicroelectronics Ltd
- Applicant Address: IL Netanya
- Assignee: STMicroelectronics Ltd
- Current Assignee: STMicroelectronics Ltd
- Current Assignee Address: IL Netanya
- Agency: Gardere Wynne Sewell LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G01D5/24

Abstract:
A device disclosed herein includes a feedback measuring circuit to measure a signal flowing through a movable MEMS mirror. Processing circuitry determines a time at which the signal indicates that a capacitance of the movable MEMS mirror is substantially at a maximum capacitance. The processing circuitry also determines, over a window of time extending from the time at which the signal indicates that the capacitance of the movable MEMS mirror is substantially at the maximum to a given time, a total change in capacitance of the movable MEMS mirror compared to the maximum capacitance. The processor further determines the capacitance at the given time as a function of the total change in capacitance, and determines an opening angle of the movable MEMS mirror as a function of the capacitance at the given time.
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