Invention Grant
- Patent Title: Optical imaging device with thermal attenuation
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Application No.: US14531109Application Date: 2014-11-03
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Publication No.: US09810996B2Publication Date: 2017-11-07
- Inventor: Bernhard Gellrich , Jens Kugler , Thomas Ittner , Stefan Hembacher , Karl-Heinz Schimitzek , Payam Tayebati , Hubert Holderer
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006021797 20060509
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
An optical imaging device, in particular for use in microlithography, includes a mask device for receiving a mask having a projection pattern, a projection device with an optical element group, a substrate device for receiving a substrate and an immersion zone. The optical element group is adapted to project the projection pattern onto the substrate and includes a plurality of optical elements with an immersion element to which the substrate is at least temporarily located adjacent to during operation. During operation, the immersion zone is located between the immersion element and the substrate and is at least temporarily filled with an immersion medium. A thermal attenuation device is provided, the thermal attenuation device being adapted to reduce fluctuations within the temperature distribution of the immersion element induced by the immersion medium.
Public/Granted literature
- US20150109591A1 OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION Public/Granted day:2015-04-23
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