Invention Grant
- Patent Title: Simultaneous retargeting of layout features based on process window simulation
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Application No.: US14918266Application Date: 2015-10-20
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Publication No.: US09811615B2Publication Date: 2017-11-07
- Inventor: George P. Lippincott , Zhitang Yu , Xima Zhang
- Applicant: Mentor Graphics Corporation
- Applicant Address: US OR Wilsonville
- Assignee: Mentor Graphics Corporation
- Current Assignee: Mentor Graphics Corporation
- Current Assignee Address: US OR Wilsonville
- Agency: Klarquist Sparkman, LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/36

Abstract:
Various aspects of the disclosed technology relate to techniques of retargeting layout features. A process window simulation on a layout design is performed to generate process window information that comprises predicted print positions of layout features computed under various process conditions. Retargeted print positions for a plurality of edge fragments in the layout design are then determined based on minimizing a combined change of targeted print positions for the plurality of edge fragments under constraints represented based on the process window information and specification limits for printed layout features. Based on the retargeted print positions, positions of the plurality of edge fragments are adjusted for optical proximity correction.
Public/Granted literature
- US20170109459A1 Simultaneous Retargeting Of Layout Features Based On Process Window Simulation Public/Granted day:2017-04-20
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