Invention Grant
- Patent Title: Nanoscale patterning method and integrated device for electronic apparatus manufactured therefrom
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Application No.: US14583492Application Date: 2014-12-26
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Publication No.: US09812333B2Publication Date: 2017-11-07
- Inventor: Sang Ouk Kim , Hyoung-Seok Moon
- Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY , INSTITUTE FOR BASIC SCIENCE
- Applicant Address: KR Daejeon KR Daejeon
- Assignee: Korea Advanced Institute of Science and Technology,Institute for Basic Science
- Current Assignee: Korea Advanced Institute of Science and Technology,Institute for Basic Science
- Current Assignee Address: KR Daejeon KR Daejeon
- Agency: McCoy Russell LLP
- Priority: KR10-2013-0163898 20131226
- Main IPC: H01L21/308
- IPC: H01L21/308 ; B81C1/00 ; H01L21/033 ; H01L21/311 ; H01L21/02

Abstract:
Provided is a nanoscale patterning method using self-assembly, wherein nanoscale patterns having desirable shapes such as a lamella shape, a cylinder shape, and the like, may be formed by using a self-assembly property of a block copolymer, and low segment interaction caused in a structure of 10 nm or less which is a disadvantage of the block copolymer may be prevented. In addition, even though single photolithography is used, pattern density may double as that of the existing nano patterns, and pitch and cycle of the patterns may be controlled to thereby be largely utilized for electronic apparatuses requiring high integration of circuits such as a semiconductor device, and the like.
Public/Granted literature
- US20150187602A1 NANOSCALE PATTERNING METHOD AND INTEGRATED DEVICE FOR ELECTRONIC APPARATUS MANUFACTURED THEREFROM Public/Granted day:2015-07-02
Information query
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