Invention Grant
- Patent Title: Load station
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Application No.: US14344930Application Date: 2012-09-14
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Publication No.: US09812343B2Publication Date: 2017-11-07
- Inventor: Leigh F. Sharrock , Tsepa Bayul , Christopher J. Dancewicz , Wayne A. Lasante
- Applicant: Leigh F. Sharrock , Tsepa Bayul , Christopher J. Dancewicz , Wayne A. Lasante
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- International Application: PCT/US2012/055374 WO 20120914
- International Announcement: WO2013/040330 WO 20130321
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/67

Abstract:
A substrate loading station including a frame forming a chamber configured to hold a controlled environment, a transfer robot connected to the frame and one or more substrate cassette holding locations each capable of having a substrate cassette holder disposed within the frame. Each of the one or more substrate cassette holding locations being configured to removably support a respective substrate cassette in a predetermined position for communication with the transfer robot to effect substrate transfer between a respective cassette and the transfer robot where the one or more substrate cassette holding locations are configured to effect the interchangeability of one or more substrate cassette holders with other substrate cassette holders for changing a substrate cassette holding capacity of the substrate loading station.
Public/Granted literature
- US20150249029A1 LOAD STATION Public/Granted day:2015-09-03
Information query
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