Invention Grant
- Patent Title: Preparation method of oxide thin-film transistor
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Application No.: US15308991Application Date: 2016-01-25
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Publication No.: US09812472B2Publication Date: 2017-11-07
- Inventor: Qi Yao , Feng Zhang , Zhanfeng Cao , Xiaolong He , Bin Zhang , Zhengliang Li
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Agency: Banner & Witcoff, Ltd.
- Priority: CN201510415622 20150715
- International Application: PCT/CN2016/072012 WO 20160125
- International Announcement: WO2017/008497 WO 20170119
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/66 ; H01L29/786 ; H01L29/45

Abstract:
A preparation method of an oxide thin-film transistor is disclosed, and this method includes: forming a gate electrode, a gate insulating layer, an active layer, a source electrode and a drain electrode; forming of the active layer, the source electrode and the drain electrode includes: sequentially forming an oxide semiconductor thin film and a source-drain electrode metal thin film on a base substrate, an entire surface of the oxide semiconductor thin film being in direct contact with the source-drain electrode metal thin film; and patterning the oxide semiconductor thin film and the source-drain electrode metal thin film with a dual-tone mask so as to form the active layer, the source electrode and the drain electrode by a single patterning process.
Public/Granted literature
- US20170162612A1 Preparation Method of Oxide Thin-Film Transistor Public/Granted day:2017-06-08
Information query
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