Invention Grant
- Patent Title: Photodiode gate dielectric protection layer
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Application No.: US15169994Application Date: 2016-06-01
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Publication No.: US09812477B2Publication Date: 2017-11-07
- Inventor: Cheng-Hsien Chou , Wen-I Hsu , Tsun-Kai Tsao , Chih-Yu Lai , Jiech-Fun Lu , Yeur-Luen Tu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113 ; H01L27/146 ; H01L31/18

Abstract:
The present disclosure relates to a method the present disclosure relates to an integrated chip having an active pixel sensor with a gate dielectric protection layer that reduces damage to an underlying gate dielectric layer during fabrication, and an associated method of formation. In some embodiments, the integrated chip has a photodetector disposed within a substrate, and a gate structure located over the substrate. A gate dielectric protection layer is disposed over the substrate and extends from along a sidewall of the gate structure to a location overlying the photodetector. The gate dielectric protection layer has an upper surface that is vertically below an upper surface of the gate structure.
Public/Granted literature
- US20160276384A1 PHOTODIODE GATE DIELECTRIC PROTECTION LAYER Public/Granted day:2016-09-22
Information query
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