Invention Grant
- Patent Title: Frontside illuminated (FSI) image sensor with a reflector
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Application No.: US14980225Application Date: 2015-12-28
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Publication No.: US09812482B2Publication Date: 2017-11-07
- Inventor: Min-Feng Kao , Dun-Nian Yaung , Jen-Cheng Liu , Jeng-Shyan Lin , Hsun-Ying Huang , Tzu-Hsuan Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L27/146
Abstract:
A frontside illuminated (FSI) image sensor with a reflector is provided. A photodetector is buried in a sensor substrate. A support substrate is arranged under and bonded to the sensor substrate. The reflector is arranged under the photodetector, between the sensor and support substrates, and is configured to reflect incident radiation towards the photodetector. A method for manufacturing the FSI image sensor and the reflector is also provided.
Public/Granted literature
- US20170186796A1 FRONTSIDE ILLUMINATED (FSI) IMAGE SENSOR WITH A REFLECTOR Public/Granted day:2017-06-29
Information query
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