Invention Grant
- Patent Title: Magnetoresistive sensor module and method for manufacturing the same
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Application No.: US15391111Application Date: 2016-12-27
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Publication No.: US09812496B2Publication Date: 2017-11-07
- Inventor: Stefan Kolb , Klemens Pruegl , Juergen Zimmer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Eschweiler & Potashnik, LLC
- Priority: DE102005008368 20050223; DE102005047414 20051004
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L27/22 ; H01L23/528 ; H01L23/522 ; H01L43/02 ; H01L23/552 ; H01L43/08 ; G01R33/09

Abstract:
In the method of manufacturing a magnetoresistive sensor module, at first a composite arrangement out of a semiconductor substrate and a metal-insulator arrangement is provided, wherein a semiconductor circuit arrangement is integrated adjacent to a main surface of the semiconductor substrate into the same, wherein the metal-insulator arrangement is arranged on the main surface of the semiconductor substrate and comprises a structured metal sheet and insulation material at least partially surrounding the structured metal sheet, wherein the structured metal sheet is electrically connected to the semiconductor circuit arrangement. Then, a magnetoresistive sensor structure is applied onto a surface of the insulation material of the composite arrangement, and finally an electrical connection between the magnetoresistive sensor structure and the structured metal sheet is established, so that the magnetoresistive sensor structure is connected to the integrated circuit arrangement.
Public/Granted literature
- US20170110505A1 Magnetoresistive Sensor Module and Method for Manufacturing the Same Public/Granted day:2017-04-20
Information query
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