Invention Grant
- Patent Title: Variable resistance memory devices and methods of manufacturing the same
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Application No.: US14984477Application Date: 2015-12-30
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Publication No.: US09812501B2Publication Date: 2017-11-07
- Inventor: Jin-Woo Lee , Youn-Seon Kang , Seung-Jae Jung , Hyun-Su Ju , Masayuki Terai
- Applicant: Jin-Woo Lee , Youn-Seon Kang , Seung-Jae Jung , Hyun-Su Ju , Masayuki Terai
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0000571 20150105
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L43/08 ; H01L43/02 ; H01L43/12 ; H01L45/00 ; H01L27/22

Abstract:
A variable resistance memory device includes a plurality of first conductive layer pattern, a plurality of second conductive layer patterns over the first conductive layer patterns, and a plurality of lower cell structures including a switching element and a variable resistance element, the lower cell structures being formed at intersections at which the first conductive layer patterns and the second conductive layer patterns overlap each other. The first conductive layer patterns, the second conductive layer patterns and the lower cell structures serves as one of a memory cell, a first dummy pattern structure and a second dummy pattern structure. The first dummy pattern structure is formed on both edge portions in the first direction, and the second conductive layer pattern of the first dummy pattern structure protrudes in the first direction from a sidewall of the lower cell structure thereunder, and the second dummy pattern structure is formed on both edge portions in the second direction, and the first conductive layer pattern of the second dummy pattern structure protrudes in the second direction from a sidewall of the lower cell structure thereon. Failures of the variable resistance memory device due to the etch residue may decrease.
Public/Granted literature
- US20160197121A1 VARIABLE RESISTANCE MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-07-07
Information query
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