Invention Grant
- Patent Title: Radiation source and method for the operation thereof
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Application No.: US14766888Application Date: 2014-02-12
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Publication No.: US09812642B2Publication Date: 2017-11-07
- Inventor: Alexander Burenkov
- Applicant: Fraunhofer Gesellschaft Zur Förderung Der Angew. Forschung E.V.
- Applicant Address: DE Munich
- Assignee: Fraunhofer Gesellschaft Zur Forderung Der Angew. Forschung E.V.
- Current Assignee: Fraunhofer Gesellschaft Zur Forderung Der Angew. Forschung E.V.
- Current Assignee Address: DE Munich
- Agency: Alix, Yale & Ristas, LLP
- Priority: DE102013202220 20130212
- International Application: PCT/EP2014/052685 WO 20140212
- International Announcement: WO2014/124949 WO 20140821
- Main IPC: H01L49/00
- IPC: H01L49/00

Abstract:
The invention relates to a radiation source, comprising at least one semiconductor substrate, on which at least two field-effect transistors are formed, which each contain a gate electrode, a source contact, and a drain contact, which bound a channel, wherein the at least two field-effect transistors are arranged adjacent to each other on the substrate, wherein each field-effect transistor has exactly one gate electrode and at least one source contact and/or at least one drain contact is arranged between two adjacent gate electrodes, wherein a ballistic electron transport can be formed in the channel during operation of the radiation source. The invention further relates to a method for producing electromagnetic radiation having a vacuum wavelength between approximately 10 μm and approximately 1 mm.
Public/Granted literature
- US20160013409A1 Radiation Source and Method for the Operation Thereof Public/Granted day:2016-01-14
Information query
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