Invention Grant
- Patent Title: Microelectromechanical device and system with low-impedance resistive transducer
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Application No.: US15293147Application Date: 2016-10-13
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Publication No.: US09815686B2Publication Date: 2017-11-14
- Inventor: Benjamin Walter , Marc Faucher
- Applicant: Vmicro , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Applicant Address: FR Villeneuve d'Ascq FR Paris
- Assignee: VMICRO,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee: VMICRO,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Current Assignee Address: FR Villeneuve d'Ascq FR Paris
- Agency: Baker & Hostetler LLP
- Priority: FR1560144 20151023
- Main IPC: H01L27/14
- IPC: H01L27/14 ; B81B3/00

Abstract:
A microelectromechanical device comprising a mechanical structure extending along a longitudinal direction, linked to a planar substrate by an anchorage situated at one of its ends and able to flex in a plane parallel to the substrate, the mechanical structure comprises a joining portion, which links it to each anchorage and includes a resistive region exhibiting a first and second zone for injecting an electric current to form a resistive transducer, the resistive region extending in the longitudinal direction from an anchorage and arranged so a flexion of the mechanical structure in the plane parallel to the substrate induces a non-zero average strain in the resistive region and vice versa; wherein: the first injection zone is carried by the anchorage; and the second injection zone is carried by a conducting element not fixed to the substrate and extending in a direction, termed lateral, substantially perpendicular to the longitudinal direction.
Public/Granted literature
- US20170113918A1 MICROELECTROMECHANICAL DEVICE AND SYSTEM WITH LOW-IMPEDANCE RESISTIVE TRANSDUCER Public/Granted day:2017-04-27
Information query
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