Invention Grant
- Patent Title: Methods and apparatus for the preparation of microscopy samples by using pulsed light
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Application No.: US13765022Application Date: 2013-02-12
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Publication No.: US09816946B2Publication Date: 2017-11-14
- Inventor: Heiko Stegmann
- Applicant: Heiko Stegmann
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: Fish & Richardson P.C.
- Priority: DE102012202519 20120217
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N1/28 ; G01N1/44 ; G01N1/04

Abstract:
Methods and apparatus are disclosed for the preparation of microscopic samples using light pulses. Material volumes greater than 100 μm3 are removed. The methods include inspecting an object with a scanning electron microscope (SEM) or a focused ion beam (FIB). The inspection includes recording an image of the object. The methods also includes delineating within the object a region to be investigated, and delineating a laser-machining path based on the image of the object so that a sample can be prepared out of the object. The methods further include using laser-machining along the delineated laser-machining path to remove a volume that is to be ablated, and inspecting the object with the scanning electron microscope (SEM) or a focused ion beam (FIB).
Public/Granted literature
- US20130213945A1 Methods and Apparatus for the Preparation of Microscopy Samples by Using Pulsed Light Public/Granted day:2013-08-22
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