Semiconductor device
Abstract:
A semiconductor device includes a plurality of memory cells being disposed in a matrix in a memory cell array area, each of the memory cells includes a capacitive element including a cell plate electrode, a capacitive insulating film, and a storage node electrode, and a switch transistor coupled between the storage node electrode and a bit line and being controlled based on a potential of a word line, a peripheral circuit disposed in a peripheral circuit area adjacent to the memory cell array area, and a signal line formed at a boundary between the memory cell array area and the peripheral circuit area. The capacitive element has a cylinder shape. The storage node electrode is formed on inner wall of a hole which penetrates through a first insulating film layer and a second insulating film layer.
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