Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US15587656Application Date: 2017-05-05
-
Publication No.: US09818472B2Publication Date: 2017-11-14
- Inventor: Hiroyuki Takahashi
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Kawasaki-Shi, Kanagawa
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Kawasaki-Shi, Kanagawa
- Agency: McGinn IP Law Group, PLLC.
- Priority: JP2014-097572 20140509
- Main IPC: G11C5/02
- IPC: G11C5/02 ; G11C11/4099 ; G11C11/4074 ; G11C11/4091 ; G11C11/4097 ; H01L27/108 ; H01L49/02 ; H01L23/528 ; G11C11/408 ; H01L23/522

Abstract:
A semiconductor device includes a plurality of memory cells being disposed in a matrix in a memory cell array area, each of the memory cells includes a capacitive element including a cell plate electrode, a capacitive insulating film, and a storage node electrode, and a switch transistor coupled between the storage node electrode and a bit line and being controlled based on a potential of a word line, a peripheral circuit disposed in a peripheral circuit area adjacent to the memory cell array area, and a signal line formed at a boundary between the memory cell array area and the peripheral circuit area. The capacitive element has a cylinder shape. The storage node electrode is formed on inner wall of a hole which penetrates through a first insulating film layer and a second insulating film layer.
Public/Granted literature
- US20170236574A1 SEMICONDUCTOR DEVICE Public/Granted day:2017-08-17
Information query